Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology
نویسندگان
چکیده
منابع مشابه
Integrated Design and Control of Flexure-Based Nanopositioning Systems Part I: Methodology
Flexure-based mechanisms, also referred to as flexures, are widely being used as motion-guidance, or bearing, elements in applications requiring multi-degree-of-freedom positioning and alignment. Unlike friction-bearings (such as sliding or rolling contact bearings), flexures can be designed to offer, to a large extent, reliable linear elastic motion with a high resolution (on the order of nano...
متن کاملInvited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.
Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the ...
متن کاملStability Analysis of Flexure Stage based Siso Nanopositioning Device
This paper presents open loop characteristics of the flexure stage based single input single output (SISO) nanopositioning device. The dynamic characteristics of the device have been analyzed. System characteristics can be improved by using different types of feedback controllers. To provide consistent, reliable and safe solution to the industrial control problems, different tuning schemes such...
متن کاملIntegrated Communication and Control Systems: Part I—Analysis
Computer networking is a reliable and efficient means for communications between disparate and distributed components in complex dynamical processes like advanced aircraft, spacecraft, and autonomous manufacturing plants. The role of Integrated Communication and Control Systems (ICCS) is to coordinate and perform interrelated functions, ranging from real-time multi-loop control to information d...
متن کاملAsok Ray Integrated Communication and Control Systems: Part I—analysis
Computer networking is a reliable and efficient means for communications between disparate and distributed components in complex dynamical processes like advanced aircraft, spacecraft, and autonomous manufacturing plants. The role of Integrated Communication and Control Systems (ICCS) is to coordinate and perform interrelated functions, ranging from real-time multi-loop control to information d...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IFAC Proceedings Volumes
سال: 2011
ISSN: 1474-6670
DOI: 10.3182/20110828-6-it-1002.03796